Vacuum Pump Flat Heater For Semiconductor Applications
Product Details
Jaye Heater Technology Co., Ltd. is one of the most reliable manufacturers and suppliers of vacuum pump flat heater for semiconductor applications in China, also supports custom service. Welcome to wholesale high quality vacuum pump flat heater for semiconductor applications at competitive price from our factory.
Product Introduction
The Vacuum Pump Flat Heater is an effective precision illustration heating solution for providing stability for vacuum pumps used in semiconductor/electronics manufacturing environments. The vacuum pump flat heater can help eliminate condensation that may form when reactive gases and/or chemical vapors condense, especially in some applications where pump oil is damaged from contaminated vapors. Condensate on pump oil can be an issue on system performance and result in unprevtioned downtime on the system. Idealvac Vacuum Pump Flat Heater is best suited for dry pumps and oil sealed rotary vane pumps in processes like etching, deposition (CVD/PVD), ion implantation and wafer cleaning.
Specifications of Vacuum Pump Flat Heater for Semiconductor Applications
| Voltage | 110V / 220V / 240V AC |
| Power Rating | 200W – 1000W (depending on model) |
| Temperature Range | Up to 120°C (adjustable) |
| Heating Element | High-grade silicone or mica-based |
| Dimensions | Custom-fit for pump model (flat pad: e.g., 300mm × 200mm) |
Parameters Required For Ordering:
1. Size
2. Quantity
3. Voltage, Power, Drawing
Features of Pump Flat Heater for Semiconductor Applications
- Eliminates condensation
Design keeps pump body and oil warm, avoiding the deposition of vapors and process by-products.
- Consistent warm surface heat
Flat low profile design allows the warm surface to be uniformly heated with minimal thermal loss.
- Safe and dependable
Developed using incorporated thermal protection and over-temperature prevention. CE/UL compliant materials may be available.
- Easy Installation and Removal
Quick and easy tool-free attachment means easier access for maintenance or simply to replace with another warmer.
How to Use Pump Flat Heater in Semiconductor Applications
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Placement
Regardless of pump design, wrap or place the flat heater around the pump housing, oil chamber, or foreline trap area.
For proper and efficient heating, make sure you make flat contact with the surface where you're installing the heater.
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Connection
Plug the heater into a power supply. Make sure you match the rated voltage.
If you are using an external controller, you will have to connect the temperature probe to your location of interest.
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Temperature Control
Set the temperature you want (around 60-90 degrees C for semiconductor processes).
During the initial heating phase, monitoring will be required to calibrate the temperature.
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Operation
For cleanroom or fab applications, leave the heater on continuously while the pump is operating to prevent vapor condensation and protect pump oil.
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Maintenance
Inspect the heater regularly for wear or thermal degradation.
Clean the contact surface and reapply the heater using your clamps or fasteners if required.
E-Mail: Cici@Jaye-Heater.Com
Whatsapp: +86 13480586962
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